Data Sheets
Tantalum
Ta, 99.95% pure, Sputtering Targets
Scope:
This product data sheet characterizes Tantalum sputtering targets sold
by SCI Engineered Materials (SCI). The following information is not a
specification; however, it may prove useful to the customer in developing
a formal product specification.
General Description:
SCI’s Tantalum sputtering targets can be produced in various sizes
and shapes. Their microstructural uniformity and grainsize consistency
produce excellent results in most thin film applications.
Bonding:
Tantalum sputtering targets produced by SCI can be bonded to customer
supplied backing plates. SCI also supplies backing plates upon request.
SCI provides several bonding processes to ensure adequate mechanical strength,
thermal transfer, and superior electrical conductivity.
Cleaning & Packaging:
A high purity solvent is used to clean and rinse the targets. The entire
target assembly is sealed in vacuum poly bags and securely packed into
SCI or customer supplied shipping containers.
Documentation:
A Certificate of Analysis and Material Safety Data Sheet are included
with each target.
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