Sputtering Targets

Sputtering and Laser Ablation Targets

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Periodic Table of Elements.


SCI Engineered Materials™ provides Ceramic and Metal targets for use in Sputtering and Laser Ablation systems. Using our in-house forming and machining capability, we manufacture one-piece targets up to 20" diameter or 14” square. We also produce custom shapes and compositions. Let us know if you have a special request.


We are committed to 100% customer satisfaction. To that end, our sales engineers want to work with you to select the appropriate target material, fabrication process, and bonding assembly that insures the success of your thin film deposition process. Because your process information may be proprietary and the free exchange of information may be the only route to a solution, we routinely enter into non-disclosure agreements to protect both your and our proprietary process information.:

Target Pricing:

Due to the technical nature of ceramic target manufacturing and the constant change of material prices, we opted not to include target pricing. Below you will find a list of some of the most common compositions that we manufacture. This list is not inclusive; so please inquire about your custom compositions.

Standard Target List:

Material/Composition Purity
Aluminum [Al] (Commercial)99.999%
Aluminum/Silicon [Al/Si 99/1wt%]99.999%
Aluminum Oxide [Al2O3]99.9% - 99.995%
Barium Strontium Titanate [Ba(1-x)Sr(x)TiO3]99.9%
Barium Titanate [BaTiO3]99.9%
Bismuth [Bi]99.999%
Calcium Titanate [CaTi03]99.9%
Carbon [C]99.995%
Cerium Oxide [CeO2]99.99%
Chromium [Cr]99.95%
Copper [Cu]99.996%
Germanium [Ge]99.999%
Gold [Au]99.99% - 99.999%
Hafnium [Hf]99.5% excl. Zr
Indium [In]99.99%
Indium/Tin [In/Sn 90/10wt%]99.99%
Indium Tin Oxide [In2O3/SnO2 90/10wt%]99.99%
Iridium [Ir]n/a
Iron [Fe]99.98%
Lanthanum Aluminate [LaAlO3]99.9%
Lanthanum Strontium Cobaltite [La(1-x)Sr(x)CoOy]99.9%
Lanthanum Strontium Manganite [La(1-x)Sr(x)MnOy]99.9%
Lanthanum Calcium Manganite [La(1-x)Ca(x)MnOy]99.9%
Lithium Cobalt Oxide [LiCoO2]99.9%
Lithium Orthophosphate [Li3PO4]99.99%
Magnesium [Mg]99.98%
Molybdenum [Mo]99.95%
Nickel [Ni]99.98%
Nickel/Chromium [Ni/Cr 80/20wt%]99.95%
Nickel/Iron [Ni/Fe 81/19wt%]99.95%
Nickel/Vanadium [Ni/V 93/7wt%]99.9%
Niobium [Nb]99.95%
Palladium [Pd]99.95%
Platinum [Pt]99.99%
Ruthenium [Ru]99.9%
Silicon [Si Monocrystalline]99.999%
Silicon [Si Polycrystalline]99.999%
Silicon Carbide [SiC]99.5%
Silicon Dioxide [SiO2]99.99%
Silver [Ag]99.99%
Strontium Ruthenate [SrRuo3]99.9%
Strontium Titanate [SrTiO3]99.9%
Tantalum [Ta]99.95%
Tin [Sn]99.99%
Tin Oxide [SnO2]99.7%
Titanium [Ti]99.2% - 99.995%
Titanium Oxide [TiO2]99.0%
Titanium/Aluminum [Ti/Al 50/50at%]n/a
Tungsten [W]99.95%
Tungsten/Titanium [W/Ti 90/10wt%]99.995%
Tungsten Carbide [WC]99.500%
Vanadium [V]99.7%
Yttria Stabilized Zirconia [Zr(1-x)Y(x)Oy]99.8%
Yttrium [Y]99.9%
Yttrium Oxide [Y2O3]99.99%
Zinc [Zn]99.99%
Aluminum doped Zinc Oxide AZ0 (0.01% - 2% dopant)99.99%
Gallium doped Zinc Oxide GZ0 (0.6% - 5% dopant)99.99%
Zinc Oxide [ZnO]99.9% - 99.999%
Silicon Aluminum99.99%
Zinc Sulfide [ZnS]99.99%
Zirconium [Zr]99.2% excl. Hf
Zirconium Oxide [ZrO2]99.9% excl. Hf